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TFT-LCD Reticle cassette

TFT-LCD
TFT-LCD Reticle cassette
Product line available from 3rd to 8.5th generation, with minimal particle intake thanks to tight structure. Designed to minimize the mask contact area and to prevent the bending of the bottom part
Product features
For processing and storage of mask in exposure process of manufacturing TFT-LCD
Product line available from 3rd to 8.5th generation
Special material for protection of mask
Minimal particle intake thanks to tight structure.
Designed to minimize mask contact area and to prevent bending of bottom part
Specifications
Mask size Model number Description
390 x 610 SYI 05-093G Canon Type, 3G Mask
520 x 800(Long Mask)
520 x 610 (Standard Mask)
SYI 05-115G Canon Type, 5G Mask
920 x 800 SYI 06-10N6G Nikon Type, 6G
1220 x 1440 SYI 06-10N8G Nikon / Canon Type, 8G