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Reticle cassette
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| Reticle cassette |
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| For processing and storage of 5" and 6" masks, with minimal particle intake thanks to tight structure of each part |
| Silicone on the mask contact area prevents damage to the mask (subject to model).
Both mask contact area and particle intake are minimized. |
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Product features
For processing and storage of 5" and 6" masks
Minimal particle intake thanks to tight structure.
Silicone on the mask contact area prevents damaging the mask (subject to model).
Designed to minimize mask contact area and to prevent bending of bottom part
Specifications
| Mask size |
Type |
Model number |
Description |
| 5" (S), 26mm |
G-Line |
SYI95-09G |
NICON / 90mil Mask |
| 5" (S), 32mm |
I-Line |
SYI95-09L |
NICON / 90mil Mask |
| 6" (S) |
LCD |
SYI97-11(LCD) |
NICON / 120mil Mask |
| 6" |
BARCODE |
SYI01-11R(BAR) |
NICON / 250mil Mask |
| 6" (L) |
SILICON |
SYI96-10(SIL) |
NICON / 250mil Mask |
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